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PPB Oxygen Analyzer
PureAire’s Parts Per Billion (ppb) Oxygen Analyzer, is ideal for facilities requiring continuous monitoring of semiconductor tools, 3D printers, glove boxes, nitrogen gas lines, and vacuum chambers, as well as any locations where there is little to no oxygen present. The unit’s sensor mounts directly into the process chamber with the use of a KF-type vacuum fitting. The analyzer is well suited for semiconductor tools, OLED manufacturers, 3D printing, and, any industry applications where inert gases, including, but not limited to, nitrogen, helium, and argon are used in a vacuum. PureAire’s stable, long-life zirconium oxide sensor will last many years in maintained environments without needing to be replaced.
- 10-10,000 PPB / 0.01-10.00 PPM Oxygen Sensor
- Accuracy ± 200 PPB of calibrated range
- KF25 Flange Connector
- Operates in a vacuum, 20 Torr or less
- Leak rate of <1E-9 (or 1X10^-9) millibars (mb)/sec
- Low Maintenance Zirconium Cell
- 3-year warranty
- 2 Alarm relays
- No drift due to environmental or temperature changes
- 24V DC Power supply included
PureAire’s Parts Per Billion (ppb) Oxygen Analyzer is well suited for environments where little to no oxygen is present including semiconductor tools, wafer transfer tools, process chambers, cryogenic gloveboxes, nitrogen gas lines, 3D printers, and nitrogen generators.
The ppb Oxygen Analyzer comes with a 10-foot cable and a 10+ year zirconium oxide sensor, which can be placed inside the process or vacuum chamber for accurate readings. To monitor readings from outside, either connect the sensor using a 10-foot cable or K25 flange, then check readings and adjust the environment as necessary.
Features
PureAire’s PPB Oxygen Analyzer can be used indoors or outdoors. Regardless of humidity, barometric pressure, or temperature changes, the oxygen analyzer performs reliably to safeguard your business. Even with a high electromagnetic field, this analyzer can provide stable, accurate readings.
PureAire PPB O2 Analyzers use a zirconium oxide cell rather than an electrochemical sensor for increased reliability and longer-lasting performance. The zirconium oxide sensor can last 10+ years. The zirconium oxide sensor responds in seconds to changes in oxygen levels, and will set off built-in audible and visual alarms notifying staff of low oxygen levels.
A KF-type vacuum fitting lets you mount the sensor directly into the vacuum chamber or into the load locks. By monitoring oxygen levels inside the vacuum, the Oxygen Analyzer improves thru-put, since there’s no need to use an ambient environment as a medium for measuring oxygen levels.
Rather than disposable sensors, which must be calibrated regularly to perform up to specifications, the Oxygen Analyzer saves time and money. Within three years, the sensor will pay for itself. Customers enjoy an average savings of $475 per year by installing the Oxygen Analyzer instead of another product.
#99201 PPB Oxygen Analyzer
Any industry applications where inert gases, including, but not limited to, nitrogen, helium, and argon are used in a vacuum. PureAire’s stable, long-life zirconium oxide sensor will last many years in maintained environments without needing to be replaced.
